srs PPR Process monitoring systems 測試

srs PPR Series-Process monitoring systems

主要指標與說明The PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure.

PPR Vacuum Process Monitoring Systems0.01, 0.1, 1.0 or 10 Torr inlet pressure3 × 10-5 Torr-L/s flow rate2 second response time (0.1 Torr)100, 200 or 300 amu systems6 orders of magnitude dynamic rangeRGA Windows softwarePPR Vacuum Process Monitoring SystemsThe PPR Process Monitoring System is designed for inline process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure. The pressure reducing path contains a micro-hole orifice which is designed to operate at one of the following pressures: 0.01, 0.1, 1 or 10 Torr. It reduces the sample pressure to the operating pressure of the RGA (about 10-6 Torr). This pressure drop is maintained by the pumping system which consists of a hybrid turbomolecular pump and a diaphragm pump. Both pumps are oil free and will not contaminate your process.The inlet assembly that attaches to your process chamber can be configured in several ways (see drawings). The system includes an RGA, by-pass valve assembly and Tee, a controller, turbo pump, diaphragm pump, and Windows software program for data acquisition and control.The software is used to operate the instrument in various modes, including analog scan, histogram mode, and pressure vs. time mode. Both Faraday cup and electron multiplier detectors are standard with the PPR system. The electron multiplier provides additional sensitivity and higher scan speeds. The PPR system is shipped compley assembled and calibrated, and is ready to attach to your vacuum process chamber.PPR Vacuum Process Monitoring SystemsPerformanceGas flow 3 × 10-5 mbar-L/s with pressure reduction inlet activeResponse time 2 seconds at 0.1 mbar inlet pressure (scales linearly with pressure)Start-up time 8 minutes nominalConnectionsInlet 2.75" CF flange, rotatable with through holesTurbo pump to controller 6 ft. cable (provided)Turbo to backing pump 6 ft. flexible hose (provided), 1/4" ID × 7/16" ODComputer interface RS-232C (28,800 baud, 9-pin D connector)Software RGA Windows application

PumpsHigh vacuum Hybrid turbomolecular/drag pump, 70 L/s, ultimate pressure 2 × 10-9 mbarBacking Diaphragm pump with ultimate pressure less than 1 mbar. Protection class IP44Cooling Requires forced air coolingGeneralPower requirements 110 VAC @ 60 Hz, 220 VAC @ 50 Hz (not field selectable), 300 WDimensions Vary with configuration (see sample configurations)Weight 16 lbs. (turbo pump, by-pass valve and Tee, RGA)33 lbs. (diaphragm pump and controller)Warranty One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.

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